Lithography is a printing process that uses a flat stone or metal plate on which the image areas are worked using a greasy substance so that the ink will adhere to them by, while the non-image areas are made ink-repellent. This special issue is dedicated to "Advances in lithography".

We appreciate the work of authors from different countires in feild of Lithography. Authors have provided reviews and studies on extreme ultraviolet lithography (EUVL), electron-beam lithography (EBL), focused ion beam lithography (FIBL), nanoimprint lithography (NIL) and directed self-assembly (DSA). They have the potentials as the replacement to conventional photolithography.